An integrated fuzzy multi-measurement decision-making model for selecting optimization techniques of semiconductor materials

Semiconductor materials play a crucial role in the development of optoelectronics and power devices. However, their evaluation and selection pose a multi-attribute decision-making problem. This problem encompasses various considerations, such as multiple evaluation criteria, data variation, and the importance of criteria multiplicity. Therefore, this study proposes an integrated fuzzy multi-measurement decision-making model (IFMMDMM) to evaluate and select optimization techniques for semi-polar III-V semiconductor materials. The research methodology is designed based on three sequential phases. Firstly, four optimization techniques for semi-polar III-V semiconductor materials and four evaluation criteria are identified to construct the evaluation decision matrix. Secondly, the fuzzy-weighted zero-inconsistency method is developed to evaluate and assign weights to the defined multi-measurement criteria. Thirdly, the fuzzy decision by opinion score method is developed to select the optimization techniques for semi-polar III-V semiconductor materials. The weighting results reveal that the highest weight value was assigned to 'root mean square under surface morphology' (0.1382), while 'peak-to-valley under surface morphology' received the lowest weight value (0.1074). The selection results indicated that 'different flux with fixed cycle NH3 treatment (D)' ranked first, whereas 'NH3 flux at changing V/III (A)' had the lowest performance order. Systematic and sensitivity ranking assessments were performed to verify the efficiency of the proposed model.

Automated summary

Semiconductor materials are crucial for optoelectronics and power devices, but evaluating and selecting them is a multi-attribute decision-making problem. This study proposes an integrated fuzzy multi-measurement decision-making model (IFMMDMM) for evaluating and selecting optimization techniques for semi-polar III-V semiconductor materials.