4.7 Article

High-Resolution Photonic Temperature Measurement System Based on Frequency Locking of Microring Resonator

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IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIM.2023.3309393

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Chip-scale microcavity; frequency locking; high-resolution temperature measurement; photonics thermometry; whispering gallery mode (WGM) resonator

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This article presents a high-resolution temperature measurement method using a silicon nitride microring resonator as a photonic thermometer. The experimental results and theoretical calculations demonstrate the excellent resolution and stability of this method, making it suitable for in-situ temperature measurement in quantum chips. This technique has significant implications for chip-level quantum metrology research.
In this article, we present a high-resolution temperature measurement method utilizing Pound-Drever-Hall (PDH) frequency locking with a silicon nitride (Si3N4) microring resonator as a photonic thermometer. The temperature response at various intervals demonstrates a measurement resolution of less than 1 mK. Through the calculations of the thermal noise floor and frequency linewidth of the Si3N4 microring resonator, we establish the theoretical resolution limit of the frequency locking method to be 41 mu K at 1-Hz measurement frequency. This precise and stable temperature measurement technique holds immense potential as an in-situ thermometers for diverse quantum chips, thus accelerating the research progress of chip-level quantum metrology.

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