期刊
SCRIPTA MATERIALIA
卷 241, 期 -, 页码 -出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.scriptamat.2023.115864
关键词
Thin film; Coating fracture; Micro -crack initiation; Nanocrystalline microstructure; Deformation mechanism
This study improves the resistance to micro-crack initiation of Niobium (Nb) coatings by tuning the substrate bias voltages during unbalanced magnetron sputtering. With the tailored nanocrystalline microstructure, intergranular nano-pinholes and amorphous phases can be eliminated effectively, resulting in compact and homogenous nanocrystalline grains with appropriate intragranular defects. As a result, large plastic deformation can be accommodated to avoid fracture of the Nb coatings.
Fracture of metallic thin films during deformation hampers extensive applications of coated engineering components. In this study, the resistance to micro-crack initiation of Niobium (Nb) coatings deposited on stainless steel substrates is improved remarkably by tuning the substrate bias voltages during unbalanced magnetron sputtering. With the tailored nanocrystalline microstructure, the failure strain for coating fracture is increased to 30 %, which is far greater than that of previous metallic coatings (below 10 %). Microstructure characterizations reveal that intergranular nano-pinholes and amorphous phases can be eliminated effectively with a moderate ions bombardment effect to avoid brittle film fracture. At the same time, compact and homogenous nanocrystalline grains with appropriate intragranular defects are obtained via enhanced atom diffusivity during deposition. Therefore, large plastic deformation can be accommodated through both stress-driven grain coarsening and continuous dislocation plasticity, avoiding fracture of the Nb coatings.
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