4.5 Article

A calibration method of CMOS-based autocollimator using reflected diffraction pattern of strip reflector

出版社

ELSEVIER SCIENCE INC
DOI: 10.1016/j.precisioneng.2023.10.004

关键词

CMOS -based autocollimator; Reflected diffraction; Angle measurement; Monte Carlo simulation; Angle generator

向作者/读者索取更多资源

A new calibration standard for a CMOS-based autocollimator using an optical angle generator with a submillimeter strip reflector (OAG-SSR) is proposed. This method provides angular values along the measuring range of the autocollimator without any mechanical movement, enabling a faster calibration process, which is suitable for integration with production lines.
We propose a new calibration standard for a CMOS-based autocollimator using an optical angle generator with a submillimeter strip reflector (OAG-SSR). The OAG-SSR combines the advantages of existing standards while minimizing their limitations by generating reference angles in the form of a reflected diffraction pattern from the strip reflector. This method provides angular values along the measuring range of the autocollimator without any mechanical movement, enabling a faster calibration process. This feature is suitable for the autocollimator integrated with production lines. In this work, we applied the propagation of uncertainty method and the Monte Carlo simulation for uncertainty evaluations. The expanded uncertainty of the reference angle from the OAG-SSR is 2.5 '' with an approximately 95% confidence level for the calibration range of 1270.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.5
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据