Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics

In force sensing, optomechanics, and quantum motion experiments, it is typically advantageous to create lightweight, compliant mechanical elements with the lowest possible force noise. Here, we report the fabrication and characterization of high-aspect-ratio, nanogram-scale Si3N4 trampolines having quality factors above 4 x 10(7) and ringdown times exceeding 5 min (mHz linewidth). These devices exhibit thermally limited force noise sensitivities below 20 aN/Hz(1/2) at room temperature, which is the lowest among solid-state mechanical sensors. We also characterize the suitability of these devices for high-finesse cavity readout and optomechanics applications, finding no evidence of surface or bulk optical losses from the processed nitride in a cavity achieving finesse 40,000. These parameters provide access to a single-photon cooperativity C-0 similar to 8 in the resolved-sideband limit, wherein a variety of outstanding optomechanics goals become feasible.