期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 -, 期 -, 页码 -出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2023.3330954
关键词
Annealing; Metals; Microwave FETs; Electromagnetic heating; Substrates; Temperature measurement; Microwave theory and techniques; COMSOL analysis; electromagnetic Losses; flexible MoS2 field-effect transistor (FET); microwave annealing (MWA); source/drain contact
In this study, a novel microwave annealing technique was proposed to enhance the performance of multilayer MoS2 FETs on flexible plastic substrates. By modulating the thickness of the electrode overlay, different annealing temperatures for different materials could be achieved, thereby improving annealing efficiency. Compared to traditional thermal annealing, this method showed superior performance in terms of improved electrical properties and reduced annealing time.
In this study, we present a novel microwave annealing (MWA) technique that exploits the electromagnetic loss of metal electrodes as a heat source to enhance the performance of multilayer molybdenum disulfide (MoS2) field-effect transistors (FETs) on flexible plastic substrates without inflicting thermal damage. We employed COMSOL-based temperature distribution analysis to understand the compatibility of our MWA process with flexible polyethylene naphthalate (PEN) substrates operating within a low thermal budget. Electrical characterizations, including mobility, contact and channel resistances, subthreshold slope, and trap density, were used to validate the effectiveness of our annealing process, with the results indicating significant improvements. Furthermore, by modulating the thickness of the electrode overlay, we demonstrated the possibility of achieving distinct annealing temperatures for different materials in the same experimental batch at an identical power level, thereby enhancing annealing efficiency. Moreover, when compared to traditional thermal annealing, our method showed superior performance in terms of enhanced electrical properties and reduced annealing time.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据