4.7 Article

Precise optical engineering of carbon-based photoluminescence arrays based on e-beam irradiation process

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OPTICS AND LASER TECHNOLOGY
卷 171, 期 -, 页码 -

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ELSEVIER SCI LTD
DOI: 10.1016/j.optlastec.2023.110332

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Carbon-based photoluminescence; E-beam irradiation; High-resolution; NH3 & sdot;H2O; MoS2 film

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With the use of electron beam irradiation, organic resist can be transformed into carbon-based micro-nano structures, allowing for the fabrication of high-resolution solid-carbon nanoarrays. Treatment with ammonia solution enhances the photoluminescence (PL) intensity of the samples. Furthermore, carbon-based nanostructures were fabricated on the surface of MoS2 film, leading to superposition state based on PL intensity and peak location.
Photoluminescent carbon nanomaterials have been widely studied for their low biological toxicity, outstanding biocompatibility, unique physical-chemical properties and obvious PL properties. The reliable fabrication of high-resolution fluorescence arrays has important significance in further studies and applications. The organic resist can be in-situ transferred into specific carbon-based micro-nano structure with fluorescence properties under e-beam irradiation. In this work, polymethyl methacrylate (PMMA) thin film was adopted for preparing solid-carbon nanostructures with 23.89 nm feature size. In a dark field environment, the structure has presented broad luminescent spectrum with maximum at 600 nm. Considering the significant influence of the surface molecular state on solid-carbon arrays, ammonia solution was used to enhance the PL intensity of the sample. The results verified that PL intensity was enhanced by a factor of 17 before and after ammonia solution treatment. Then carbon-based nanostructures were also fabricated on the surface of MoS2 film for studying PL properties between 2D materials and carbon-based dot arrays. The results show that superposition state was produced based on PL intensity and peak location of the solid-carbon dot array and MoS2 film. The optical behavior study of high-resolution solid-carbon arrays will provide a powerful supplement for carbon-based photophysical study and high-performance sensing devices.

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