期刊
OPTICS AND LASER TECHNOLOGY
卷 171, 期 -, 页码 -出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.optlastec.2023.110339
关键词
Sol-gel; Silica-titania; Thin film; Dip-coating; Planar waveguide; Optical loss
This work presents a study on low-loss waveguide layers for planar evanescent wave sensor applications. Crack-free SiOx:TiOy composite layers with refractive indices of approximately 1.65 were fabricated using a sol-gel method and dip-coating technique. The fabricated layers exhibited good waveguide properties and optical homogeneity.
This work reports a study on low-loss waveguide layers for planar evanescent wave sensor applications. Crack -free SiOx:TiOy composite layers with refractive indices of similar to 1.65, in the visible spectra range, were fabricated using a sol-gel method and a dip-coating technique. Layers of thickness in the 220-360 nm range were produced in a single coating process. By multiple coatings, SiOx:TiOy composite layers of thickness up to 1000 nm were produced. Fabricated layers demonstrated good waveguide properties in the Vis spectral range. The dispersion characteristics of the developed layers refractive index were determined using the spectroscopic ellipsometry method. Spectrophotometric tests validated their optical homogeneity. Using the Tauc method, the widths of optical band gaps were determined, and their high values (E-g > 3.7 eV) attest to the amorphous nature of the layer material. The FT-IR studies testified to Si-O-Ti bonds, an attribute of amorphous SiOx:TiOy composites. The tests of surface morphology of the SiOx:TiOy layers, using atomic force microscopy, scanning electron microscopy, and optical profilometry, confirmed their high smoothness. Using the m-line method, waveguide properties and optical losses were examined. To facilitate the interpretation of the experimental results, the mode characteristics and the calculated impact of surface morphology of the waveguide layer.
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