Study on the Cold Atmospheric Plasma Process via Oxygen (O2) Fluid Flow Fabrication RB-SiC Ceramic

In large-scale aspheric precision grinding of the space optical mirror based on RB-SiC ceramic, precision grinding is the necessary process for obtain machined surface finish. To further obtain the minimum tolerances and morphological and planar changes of the workpiece, the resin-bond of the grain size 600(#) precision grinding diamond grinding wheel with the finish-surface precision grinding is generally used in the process. However, the technology to generate the precision grinding position via the point P(A(i), A(j)) model analysis of the grinding wheel forms part of the as optical precision elements in surface modified layer of fundamental understanding and accurately control the actual mathematical calculation and a novel cold atmospheric plasma (CAP) process via oxygen (O-2) design. In this paper, an aim need to pay closer attention to the mathematical model calculation method of cold atmospheric plasma process via oxygen, the surface modification region and the improvement of finish-surface of existing ceramic. As a summary, we provides a effective cold atmospheric plasma process via oxygen fluid flow-precision grinding via the experimental test and mechanism study of cold atmospheric plasma process via oxygen fluid flow precision grinding composite technology, the establishment of basic theory of mechanics-thermotics composite technology provides an important theoretical basis. The surface modification for RB-SiC hard-brittle ceramic process and about technical difficulties of the precision grinding at room temperature. The CAP process via oxygen (O-2) surface modification process produce SiO2 or C layer, C-O, Si-C-O compound through mechanics-thermotics composite and physicochemical reaction at room temperature micro-grinding.

Automated summary

This paper introduces the precision grinding process for large-scale aspheric space optical mirror based on RB-SiC ceramic, including precision grinding and cold atmospheric plasma surface modification. The mathematical model calculation method for cold atmospheric plasma process is proposed, and the effectiveness of the technology is verified through experimental tests and mechanism studies.