A 3D-PRINTED FUNCTIONAL MEMS ACCELEROMETER

3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-photon polymerization combined with the evaporation of metal strain gauge transducers. We measured the resonance frequency, the responsivity, and the signal stability over a period of 10 h of the 3D-printed accelerometer.

Automated summary

3D printing of MEMS devices enables cost-efficient production of custom-designed and complex 3D MEMS for prototyping and low-volume applications. This research presents the first micro 3D-printed functional MEMS accelerometers using two-photon polymerization and metal strain gauge transducers. The resonance frequency, responsivity, and signal stability of the 3D-printed accelerometer were measured over a period of 10 hours.