A PIEZOELECTRIC MEMS SPEAKER WITH STRETCHABLE FILM SEALING

Summary: This paper presents the design, fabrication, and characterization of an ultrahigh-sensitivity piezoelectric MEMS speaker. By utilizing a newly derived analytical expression, the speaker achieves a high sensitivity. The sensitivity of the speaker at various frequencies is the highest among piezoelectric MEMS speakers, with a power consumption ten times lower than that of conventional electrodynamic speakers.

Summary: This paper presents a MEMS speaker based on piezoelectric bimorph cantilevers that achieves a higher sound pressure level (SPL) while keeping the size as small as possible. By connecting the bimorph cantilevers in parallel, the actuation voltage is fully utilized. The research also demonstrates low harmonic distortion of the MEMS speaker within a certain frequency range.