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Article
Engineering, Electrical & Electronic
A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure
Feng Xue et al.
Summary: This paper presents a low-power multichannel metal oxide semiconductor (MOS) gas sensor device with four gas detecting channels. The device adopts a T-shaped structure with a bridge-type single strip microheater along its horizontal axis, which houses the four gas detecting channels. The device shows different temperatures at each channel based on the temperature gradient of the microheater. Gas tests for four environmental air pollutants demonstrate that all four channels respond to H-2, CO, NO2, and NH3 gases, with a low total power consumption.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2022)
Review
Engineering, Electrical & Electronic
MEMS Gas Sensors: A Review
Muhammad Izzudin Ahmad Asri et al.
Summary: MEMS gas sensors are capable of detecting gas presence and concentration in the atmosphere and have been widely used in various fields, particularly in biomedical applications. This paper provides a comprehensive review of state-of-the-art gas sensors developed using MEMS technology, focusing on the use of electrochemical, optical, and acoustic gas sensors in biomedical applications.
IEEE SENSORS JOURNAL (2021)
Proceedings Paper
Engineering, Electrical & Electronic
A NOVEL LOW POWER HEXAGONAL GAS SENSOR CELL FOR MULTI-CHANNEL GAS DETECTION
Dongcheng Xie et al.
Summary: This paper presents a low-power, high-sensitivity metal oxide gas sensor cell with a novel hexagonal structure for multi-channel gas detection. The sensor cell features six integrated sensors on a hexagonal micro-hotplate, which achieves 6-channel detection of ethanol simultaneously. The sensor cell shows excellent semiconductor process compatibility and consumes an average power of only 3.03 mW when responding to ethanol.
2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) (2021)