SINGLE-LAYER-ELECTRODE TEMPERATURE-MODULATED SNO2 GAS SENSOR CELL WITH LOW POWER CONSUMPTION FOR DISCRIMINATION OF FOOD ODORS

Summary: This paper presents a low-power multichannel metal oxide semiconductor (MOS) gas sensor device with four gas detecting channels. The device adopts a T-shaped structure with a bridge-type single strip microheater along its horizontal axis, which houses the four gas detecting channels. The device shows different temperatures at each channel based on the temperature gradient of the microheater. Gas tests for four environmental air pollutants demonstrate that all four channels respond to H-2, CO, NO2, and NH3 gases, with a low total power consumption.

Summary: MEMS gas sensors are capable of detecting gas presence and concentration in the atmosphere and have been widely used in various fields, particularly in biomedical applications. This paper provides a comprehensive review of state-of-the-art gas sensors developed using MEMS technology, focusing on the use of electrochemical, optical, and acoustic gas sensors in biomedical applications.