☆ 3.8 Proceedings Paper

Toward a Polysilicon-Based Electrostatically Actuated DC MEMS Switch

2023 21ST IEEE INTERREGIONAL NEWCAS CONFERENCE, NEWCAS (2023)

A MEMS Electrothermal Actuator Designed for a DC Switch Aimed at Power Switching Applications and High Voltage Resilience

Abdurrashid Hassan Shuaibu et al.

Summary: This work presents the design and fabrication of a V-shaped electro-thermally actuated microelectromechanical systems (HEMS) actuator for a DC switch structure. The actuator reduces crosstalk between the switch and heater and achieves a significantly reduced out-of-plane motion compared to a reference design. The switch is capable of withstanding high voltage and is suitable for use in high voltage harsh environments.

2022 20TH IEEE INTERREGIONAL NEWCAS CONFERENCE (NEWCAS) (2022)

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Article Engineering, Electrical & Electronic

Migration of adhesive material in electrostatically actuated MEMS switch

Ilia V. Uvarov

Summary: This paper describes a failure mechanism of electrostatically actuated MEMS switch related to the migration of adhesive material in a dielectric substrate. The specific process leading to device failure involves the formation of nanoscale structures consisting of Cr and C, which grow into micrometer-sized formations during operation, causing stiction or short circuiting. In addition to the electrode gap, Cr and C also agglomerate into spots and droplets around the gate and its connecting line.

MICROELECTRONICS RELIABILITY (2021)

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Proceedings Paper Engineering, Electrical & Electronic

Power Handling Capability Enhanced RF MEMS Switch Using Modified-Width Cantilevers Structure

Yulong Zhang et al.

Summary: The enhanced power handling capability RF MEMS switch with modified-width cantilevers can suppress skin-effect-led uneven current distribution and improve power handling capability. A thermo-electro-mechanical model based on FEA is applied to analyze the devices, with simulations indicating the design effects. The fabricated and tested switch demonstrates its ability to withstand higher RF continuous wave power compared to switches with equi-width cantilevers.

2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) (2021)

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Article Engineering, Electrical & Electronic