4.7 Article

Profilometry of thin films on rough substrates by Raman spectroscopy

期刊

SCIENTIFIC REPORTS
卷 6, 期 -, 页码 -

出版社

NATURE PUBLISHING GROUP
DOI: 10.1038/srep37859

关键词

-

资金

  1. Czech Science Foundation Project [14-15357S]
  2. Czech Ministry of Education, Youth and Sports Project [LM2015087]
  3. Swiss Commission for Technology and Innovation [17705.1]
  4. Meyer Burger Research
  5. King Abdullah University of Science and Technology (KAUST)
  6. H2020-LCE project H2020-LCE [727523]

向作者/读者索取更多资源

Thin, light-absorbing films attenuate the Raman signal of underlying substrates. In this article, we exploit this phenomenon to develop a contactless thickness profiling method for thin films deposited on rough substrates. We demonstrate this technique by probing profiles of thin amorphous silicon stripes deposited on rough crystalline silicon surfaces, which is a structure exploited in high-efficiency silicon heterojunction solar cells. Our spatially-resolved Raman measurements enable the thickness mapping of amorphous silicon over the whole active area of test solar cells with very high precision; the thickness detection limit is well below 1 nm and the spatial resolution is down to 500 nm, limited only by the optical resolution. We also discuss the wider applicability of this technique for the characterization of thin layers prepared on Raman/photoluminescence-active substrates, as well as its use for single-layer counting in multilayer 2D materials such as graphene, MoS2 and WS2.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.7
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据