期刊
IEEE MICROWAVE AND WIRELESS TECHNOLOGY LETTERS
卷 33, 期 6, 页码 643-646出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LMWT.2023.3239984
关键词
Corrugated line; matched load; on-wafer mea-surements; planar Goubau line (PGL); scattering parameters; silicon-on-insulator (SOI); submillimeter wave circuits; suspended substrate; terahertz waveguides
In this work, a termination for planar Goubau lines (PGLs) based on an exponentially tapered corrugated line is proposed to achieve broadband impedance-matched loads with small reflections. A 400 μm-long PGL load was fabricated on a 10 μm-thick silicon substrate, and the measured reflections were below -19 dB in the frequency range of 0.5-1.1 THz, indicating good agreement between simulations and measurements.
The planar Goubau line (PGL) is a promising low-loss metal waveguide for terahertz applications. To enable advanced circuits and multiport measurements based on PGLs, there is a strong need for broadband impedance-matched loads, which can be used to absorb the energy and minimize stand -ing waves in a system. In this work, we propose a termina-tion for PGLs based on an exponentially tapered corrugated line, gradually increasing conductor losses while maintaining small reflections. The corrugation density is high enough to increase conductor losses without requiring an auxiliary low-conductivity material. A 400-mu m-long PGL load was fabricated on a 10-mu m-thick silicon substrate suspended in the air. Sim-ulations of the load show excellent agreement with calibrated reflection measurements in the frequency range 0.5-1.1 THz. Above the cut-off frequency of around 580 GHz, the measured reflections are less than -19 dB, below the noise floor of the characterization setup.
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