Fabrication and Characterization of Integrable GaAs-Based High-Contrast Grating Reflector and Fabry-Perot Filter Array With GaInP Sacrificial Layer

Integrable GaAs-based high-contrast gratings (HCGs) are fabricated and characterized, targeting applications in high-speed vertical-cavity surface-emitting lasers (VCSELs). A Ga0.51In0.49P sacrificial layer beneath the GaAs layer is employed to create a low index surrounding HCG strips by selective etching. Experimental results show that the finite-size HCG has a reflectivity of 93% from 1270 to 1330 nm for the transverse magnetic polarization, which is consistent with the calculated results. An HCG-based Fabry Perot filter array formed by the different HCGs, air gap, and GaAs substrate is demonstrated. The measured resonance wavelengths of the filter arrays are consistent with the theoretical results, which implies that the resonance wavelength of such filters can be tuned by parameters of the HCG itself.