期刊
VACUUM
卷 125, 期 -, 页码 146-153出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2015.12.016
关键词
Magnetron sputtering; Thin films; Hard coatings; Mechanical properties
资金
- European Community Seven Framework Programmed (FR7-NMP-EU-MEXICO)
- CONACYT [263878, 125141]
- DGAPA-PAPIIT projects
Composite coatings of niobium nitride containing bismuth inclusions were deposited using a dual magnetron sputtering system with independent power suppliers for each targets; Bi and Nb. The deposition was performed under and Ar/N-2 atmosphere at a 2.3 flow rate ratio, which allows the stoichiometric NbN phase to be obtained. The aim of this work was to evaluate the effect of increasing concentrations of Bi, proposed as a lubricous second phase, in the structural, mechanical and tribological properties of niobium nitride (NbN) coatings, searching for a reduction in the coefficient of friction but trying to keep hardness values larger than the tool steels (>10 GPa). The power applied to the Nb target was fixed, while the power on the Bi target was increased; obtaining Bi atomic percentage values of 1.7, 4.9 and 8.4 at%. The Bi inclusions showed different sizes and distribution in the volume and surface of the coatings. The results indicated a reduction in the hardness from 30 GPa of the NbN coating to 13.9 GPa for the highest Bi concentration. However, a more significant reduction was observed for the coefficient of friction (CoF) from 0.8 of the NbN to 0.3 for Bi concentrations between 4.9 and 8.4 at%. (C) 2015 Elsevier Ltd. All rights reserved.
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