4.4 Article

Highly doped ZnO films deposited by spray-pyrolysis. Design parameters for optoelectronic applications

期刊

THIN SOLID FILMS
卷 605, 期 -, 页码 149-156

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2015.09.053

关键词

Spray pyrolysis; Mosaicity; Sol-gel; Zinc oxide; Structural properties; Electrical properties

资金

  1. ANPCyT from Argentina [PICT 32515]
  2. Universidad Nacional del Litoral from Argentina [CAID 2009/68-343]
  3. CONICET from Argentina [PID 0414]

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Synthesis and preparation of ZnO films are relevant subjects for obtaining transparent and conducting layers with interesting applications in optoelectronics and photovoltaics. Optimization of parameters such as dopant type and concentration, deposition time and substrate temperature is important for obtaining ZnO layers with optimal properties. In this work we present a study about the induced effects of deposition time on optical and electrical properties of ZnO thin films. These films were deposited by spray pyrolysis of a suitable Zn precursor, obtained through the sol-gel method. The deposition time has direct incidence on internal stress in the crystal structure, generating defects that may affect transparency and electrical transport into the layers. We performed mosaicity measurements, through X-ray diffraction, and used it as a tool to get an insight on structural characteristics and homogeneity of ZnO layers. Also, through this technique, we analyzed thickness and doping effects on crystallinity and carrier transport properties. (C) 2015 Elsevier B.V. All rights reserved.

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