期刊
THIN SOLID FILMS
卷 613, 期 -, 页码 24-28出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2015.11.020
关键词
Germanium; Germanium-on-Insulator; GOI; Mobility
类别
资金
- Grants-in-Aid for Scientific Research [25600079, 26286044] Funding Source: KAKEN
Structural and electrical properties of a Ge(111) layer directly grown on a Si(111) substrate are studied. Via optimized two-step growth manner, we forma high-quality relaxed Ge layer, where strain-relieving dislocations are confined close to a Ge/Si interface. Consequently, a density of holes, which unintentionally come from crystal defects, is highly suppressed below 4 x 10(16) cm(-3), which leads to significantly high hole Hallmobility exceeding 1500 cm(2)/Vs at room temperature. By layer transfer of the grown Ge layer, we also fabricate a Ge(111)-on-Insulator, which is a promising template for high-performance Ge-based electronic and photonic devices. (C) 2015 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据