期刊
THIN SOLID FILMS
卷 604, 期 -, 页码 48-54出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2016.03.017
关键词
Zinc; Zinc oxide; Gas sensors; Hydrogen Porous nanostructures; Sputtering; Near-equilibrium condensation; Oxidation
类别
资金
- Fulbright Foundation (Ukraine) [N 15141828]
The aim of the work was to develop a technology for porous ZnO nanosystems formation and to determine the relationship between their morphology and sensor properties to hydrogen. With this purpose, a two step technology has been used. On the first stage, porous Zn layers with different morphologies have been synthesized under near-equilibrium condensation conditions implemented by means of an accumulating systems plasma-condensate developed by us. On the second stage, the layers have been oxidized in pure oxygen atmosphere. The sensor tests performed at 250 degrees C have shown that sensitivity of the porous layers was more than 50% at hydrogen concentration 3000 ppm in dry air. (C) 2016 Elsevier B.V. All rights reserved.
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