4.4 Article

Solution-processed ZnO thin films for low voltage and low temperature application in flexible resistive random access memory

期刊

THIN SOLID FILMS
卷 616, 期 -, 页码 728-732

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2016.09.023

关键词

Zinc oxide; Spin coating; Flexible substrate; Resistive random access memory

资金

  1. Ministry of Science and Technology, Taiwan [MOST 105-2221-E-167-029]

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The demand for flexible resistive random access memories (ReRAM) has increased because wearable devices, such as smart watches, e-paper, and flexible displays, have become a trend. These devices have advantages such as portability, light weight, and user-friendly interfaces, which are better than the currently available rigid electronic systems. A flexible nonvolatile memory is an essential part of electronic systems. In this study, zinc oxide (ZnO) thin films were used for fabricating ReRAM devices. The fabrication was achieved by a simple solution processing method and low temperature annealing (approximately 100 degrees C) on a hot plate. In addition, the devices fabricated on polyimide substrates showed excellent operational characteristics with a high ratio (>= 10(4)) of the high resistance state to the low resistance state. The operational voltage of the ZnO ReRAM devices was <2 V, and the reset operational voltage was less than -1 V. (C) 2016 Elsevier B.V. All rights reserved.

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