期刊
THIN SOLID FILMS
卷 605, 期 -, 页码 163-168出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2015.09.011
关键词
Aluminum-doped zinc oxide; Aerosol-assisted chemical vapor deposition; Atomization interval time
类别
资金
- Natural Science Foundation of Hebei Province [B2012203070]
- Education Department, Hebei Province on Key Projects of Natural Science Research for Institution of Higher Learning [ZD20131010]
Al-doped ZnO (AZO) thin films were prepared on glass substrates with different atomization interval times by aerosol-assisted chemical vapor deposition method. The structure, morphology, and optical and electrical properties were investigated by X-ray diffractometer, atomic force microscope, UV-vis double beam spectrophotometer and 4 point probe method. ZnO thin films exhibited strong growth orientation along the (002) plane and the crystalline was affected by the atomization interval time. All the films had high transmittance and the films with interval times of 2 min and 4 min had good haze values for the transparent conducting oxide silicon solar cell applications. The AZO thin film had the best optical and electrical properties when the atomization interval time was 4 min. This is very important for the optoelectronic device applications. The surface morphology of AZO films depended on the atomization interval time. (C) 2015 Elsevier B.V. All rights reserved.
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