期刊
TECHNOMETRICS
卷 59, 期 3, 页码 351-360出版社
TAYLOR & FRANCIS INC
DOI: 10.1080/00401706.2016.1236755
关键词
Backward elimination; Family-wise error rate; Fault detection and diagnosis; Lasso; Multistage manufacturing process; Orthogonal greedy algorithm; Sparsity; Wafer fabrication
资金
- Academia Sinica Investigator Award
- National Science Foundation [DMS-1407828]
- Ministry of Science and Technology of Taiwan [MOST 103-2118M-390-004-MY2, MOST 102-2118-M-390-003]
- Division Of Mathematical Sciences
- Direct For Mathematical & Physical Scien [1407828] Funding Source: National Science Foundation
Motivated by applications to root-cause identification of faults in multistage manufacturing processes that involve a large number of tools or equipment at each stage, we consider multiple testing in regression models whose outputs represent the quality characteristics of a multistage manufacturing process. Because of the large number of input variables that correspond to the tools or equipments used, this falls in the framework of regression modeling in the modern era of big data. On the other hand, with quick fault detection and diagnosis followed by tool rectification, sparsity can be assumed in the regression model. We introduce a new approach to address the multiple testing problem and demonstrate its advantages over existing methods. We also illustrate its performance in an application to semiconductor wafer fabrication that motivated this development. Supplementary materials for this article are available online.
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