4.2 Article Proceedings Paper

In situ photoelectron spectroscopic characterization of reactively sputtered, doped vanadium oxide thin films

期刊

SURFACE AND INTERFACE ANALYSIS
卷 48, 期 7, 页码 440-444

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WILEY
DOI: 10.1002/sia.5989

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vanadium oxide thin films; in situ XPS; Ge doping; reactive magnetron sputtering

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Thin films of pure vanadium oxide (VOx) and Ge doped vanadium oxide (VOx:Ge) have been deposited by reactive magnetron sputtering on Si (100) substrates. These films were characterized by means of in situ X-ray photoelectron spectroscopy and ultraviolet photoelectron spectroscopy to address the doping induced changes in the core-level and valence-band spectra of the material. Doped films exhibit a decrease in the density of states at the Fermi level, indicating the insulating character of said films compared with the undoped ones. Doped vanadium dioxide is a promising candidate for switchable absorber coatings for solar thermal collectors. Copyright (c) 2016 John Wiley & Sons, Ltd.

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