Growth of L11 structured CoPt thin films by alternate sputtering method on glass substrate

L1(1) structured [Co-x/Pt-x](n) multilayer films (x = 0.1-2 nm and n = 1-20) were prepared by alternate sputtering of Co and Pt layers on glass substrate with textured Pt(111) underlayer. The [Co-x/Pt-x](n) multilayer films showed higher perpendicular magnetic anisotropy (PMA) and out-of-plane coercivity (H-c perpendicular to) for x = 0.3-0.5 and n = 4-6. Poor PMA was found when x was below 0.3. Further increase in x and n, the magnetic properties of [Co/Pt](n) multilayer films significantly deteriorated. In this study, [Co-0.5/Pt-0.5](4) multilayer film showed high PMA, high magnetocrystalline anisotropy constant (K-u similar to-2.1 x 10(6) J/m(3)), and larger H-c perpendicular to (similar to 160 kA/m). It is demonstrated that L1(1) structured [Cox/Ptx](n) multilayer films with better perpendicular magnetic properties can be fabricated by alternate sputtering method. The correlation between magnetic properties and microstructures of [Co-x/Pt-x](n) multilayer films with different x and n was also investigated. (C) 2016 Elsevier B.V. All rights reserved.