Slip system analysis and X-ray topographic study on β-Ga2O3

Slip system and possible dislocation characters in a wide-bandgap semiconductor beta-Ga2O3 have been studied. The space lattice is monoclinic in which oxygen sublattice has a distorted cubic close-packed structure consisting of {(2) over bar 01}, {101}, {(3) over bar 10} and {(3) over bar 10} planes. The shortest and second shortest translation vectors on each plane are possible Burgers vectors of a dislocation. Dislocations in a ((2) over bar 01)-oriented wafer were observed by means of synchrotron radiation X-ray topography with reflection geometry. The observed dislocations were analyzed in relation to the slip system. Using the (g) over right arrow . (b) over right arrow invisibility criterion and the obtained slip system, Burgers vectors of some typical dislocations were identified. (C) 2016 Elsevier Ltd. All rights reserved.