期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 223, 期 -, 页码 83-88出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2015.09.022
关键词
MEMS; Multi mode sensor; Thin-film piezoelectric resonator; Electrochemical; Glucose
资金
- Natural Science Foundation of China (NSFC) [61176106, 61501320]
- 111 Project [B07014]
- Tianjin Applied Basic Research and Advanced Technology [14JCYBJC41500]
We presented a MEMS multi-mode sensing system by integrating electrochemical working electrode and solid-mounted thin-film piezoelectric resonator (SMR) on a single micro-sized chip, which is capable of detecting three sensing modes of electrochemistry, gravimetry and viscometry. As a model test sample, glucose concentration was successfully monitored using this integrated sensor. The electrochemical sensor amperometrically detected glucose concentration change, and SMR tracked the concentration variation through impedance response to viscosity. Optimized number of single-walled carbon nanotubes (SWCNTs) - poly (dimethyldiallylammonium chloride) (PDDA) / glucose oxidase (GOD) modification layers was also determined with the help of SMR by monitoring the mass-sensitive frequency shift. SMR proved to be a suitable support for chip-integrated electrochemical sensor for glucose detection. This integrated chip sensor can be conveniently fabricated with high throughput, shows significant potential for chemical and biological sensing applications. (C) 2015 Elsevier B.V. All rights reserved.
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