期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 230, 期 -, 页码 167-175出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2016.02.044
关键词
Thin film; Phase composition; Crystal structure; Gas sensor; Nitrogen dioxide
资金
- Ministry of Education and Science of the Russian Federation [11.2432.2014/K]
- bilateral program Russian-German Laboratory at BESSY
In the paper the SiOxCuOy thin and thick films were deposited from the alcoholic solutions employing the sol-gel technique. Investigations of films structure and surface morphology are represented. The joint Xray diffraction and X-ray photoelectron spectroscopy studies reveal presence both CuO and Cu2O phases and formation of CuSiO3 phase with crystallites sizes of 35-50 nm. It is shown that surface roughness of the thin films increases in proportion to the increase of copper content in the precursor. Effective band gap energy estimated from the absorption spectra depends on the film thickness and phase composition. The gas sensitivity tests versus 1-25 ppm of NO2 showed the dependence of gas sensing response on the film thickness. The operating temperature was 170 degrees C and 20 degrees C for thin and thick film sensors, respectively. Accelerated stability tests of the initial resistance and gas sensor response performed high stability and reproducibility of the thin film sensors. (C) 2016 Elsevier B.V. All rights reserved.
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