期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 241, 期 -, 页码 113-119出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2016.02.022
关键词
Accelerometer; Piezoelectric; Vibration monitoring; Wireless sensor; Electromagnetic interference
资金
- Hoestar Inspection International
- Institute of Materials Research and Engineering (IMRE), A*STAR [IMRE/12-3P1101]
A miniaturized wireless accelerometer using a piezoelectric micro sensing element is designed, theoretically analyzed, and demonstrated for remote mechanical vibration monitoring. The micro sensing element comprises a micromachined monolithic silicon seismic mass and multiple silicon beams coated with in-plane polarized (Pb, La)(Zr, Ti)O-3 (PLZT) ferroelectric thin film. A low profile compact package is obtained for accommodating all the micro sensing element, charge amplifier and signal processing circuits, radio frequency module, and battery. The electrical output linearly proportional to the vibration acceleration is amplified, digitalized and transmitted to a remote base unit through radio frequency communication. The effects of the device package on the dynamic response of the wireless piezoelectric accelerometer including shielding of ambient interference are investigated. (C) 2016 Elsevier B.V. All rights reserved.
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