期刊
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
卷 31, 期 10, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0268-1242/31/10/103005
关键词
amorphous silicon; particle detector; radiation hardness; monolithic device
类别
资金
- CERN
- ETHZ
- Swiss National Science Foundation [126926/1, 144375/1]
Hydrogenated amorphous silicon (a-Si: H) is attractive for radiation detectors because of its radiation resistance and processability over large areas with mature Si microfabrication techniques. While the use of a-Si: H for medical imaging has been very successful, the development of detectors for particle tracking and minimum-ionizing-particle detection has lagged, with almost no practical implementation. This paper reviews the development of various types of a-Si: H-based detectors and discusses their respective achievements and limitations. It also presents more recent developments of detectors that could potentially achieve single particle detection and be integrated in a monolithic fashion into a variety of applications.
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