期刊
SCIENCE
卷 352, 期 6290, 页码 1190-1194出版社
AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/science.aaf6644
关键词
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资金
- Air Force Office of Scientific Research (MURI) [FA9550-14-1-0389]
- Charles Stark Draper Laboratory, Inc. [SC001-0000000959]
- Thorlabs Inc.
- Ministry of Science and Technology, Taiwan [104-2917-I-564-058]
- Charles Stark Draper Fellowship
- Harvard John A. Paulson School of Engineering and Applied Sciences
- A*STAR Singapore
- NSF
Subwavelength resolution imaging requires high numerical aperture (NA) lenses, which are bulky and expensive. Metasurfaces allow the miniaturization of conventional refractive optics into planar structures. We show that high-aspect-ratio titanium dioxide metasurfaces can be fabricated and designed as metalenses with NA = 0.8. Diffraction-limited focusing is demonstrated at wavelengths of 405, 532, and 660 nm with corresponding efficiencies of 86, 73, and 66%. The metalenses can resolve nanoscale features separated by subwavelength distances and provide magnification as high as 170x, with image qualities comparable to a state-of-the-art commercial objective. Our results firmly establish that metalenses can have widespread applications in laser-based microscopy, imaging, and spectroscopy.
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