期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 87, 期 1, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4940412
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资金
- National Natural Science Foundation of China [51305439]
- National Natural Science Foundation of Jiangsu Province of China [BK20141205]
A valve-type piezoelectric diaphragm pump using secondary resonant vibrator is introduced in this paper. The secondary resonant vibrator, which is mainly composed of a first vibrator and a second vibrator, is used to coordinate the frequency incompatibility between piezoelectric elements and check valves. The intermittent vibration of the first vibrator excites the resonant vibration of the second vibrator. The diaphragm in the pump chamber moves with the second vibrator, resulting in chamber volume and pressure variations. Control circuit capable of frequency tracking is designed. Vibration displacement and flow rate changing with driving voltage amplitude, frequency, and backpressure are studied in experiments. The flow rate of a prototype driven by voltage of 712 V-pp is 13.94 ml/min at secondary resonant frequency of 6 Hz. (C) 2016 AIP Publishing LLC.
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