期刊
RADIO SCIENCE
卷 51, 期 10, 页码 1636-1644出版社
AMER GEOPHYSICAL UNION
DOI: 10.1002/2015RS005893
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资金
- U.S. Army Research Laboratory, Adelphi, MD, USA [W91ZLK-12-P-0447]
Theory and optimization were studied in detail to find optimum dimensions of fixed-fixed beam for the sake of low-power and wide-range frequency tuning applications. This optimization also provides a method to avoid device failure due to high thermal stress. The good agreement between theory, simulation, and measurement is achieved and can serve as a guidance for future works. Two resonators, consisting of multiple metal, dielectric, and polysilicon layers, were designed; the first resonator at 303.4 kHz and the second at 2053 kHz achieve the frequency tuning ranges of 35.7%-42.6%, respectively. A power consumption of 900 mu W/beam is achieved for the first design of 152 mu m length beam while providing a frequency tuning of 35.7%. Further increase in the tuning capability was achieved by the increase in the applied DC bias voltage between adjacent beams.
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