期刊
PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS
卷 62, 期 2, 页码 273-285出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.pcrysgrow.2016.04.014
关键词
silicon; convection; defect; impurity; stress
This paper focuses on the recent developments in Czochralski (CZ) crystal growth of silicon for large-scale integrated circuits (LSIs) and multi-crystalline silicon growth using a directional solidification method for solar cells. Growth of silicon crystals by the CZ method currently allows the growth of high-quality crystals that satisfy the device requirements of LSIs or power devices for electric cars. This paper covers how to obtain high-quality crystals with low impurity content and few point defects. It also covers the directional solidification method, which yields crystals with medium conversion efficiency for photovoltaic applications. We discuss the defects and impurities that degrade the efficiency and the steps to overcome these problems. (C) 2016 Elsevier Ltd. All rights reserved.
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