期刊
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA
卷 113, 期 26, 页码 7026-7034出版社
NATL ACAD SCIENCES
DOI: 10.1073/pnas.1606132113
关键词
electron scattering; close coupling; ab initio; plasmas; kinetic modeling
资金
- National Science Foundation [PHY-1403245]
- DoD High Energy Laser Multidisciplinary Research Initiative
- DoE Office of Fusion Energy Sciences [DE-SC0001319]
- Extreme Science and Engineering Discovery Environment [TG-PHY-090031]
- Direct For Mathematical & Physical Scien
- Division Of Physics [1212450] Funding Source: National Science Foundation
- Direct For Mathematical & Physical Scien
- Division Of Physics [1520970] Funding Source: National Science Foundation
Electron collisions with atoms, ions, molecules, and surfaces are critically important to the understanding and modeling of low-temperature plasmas (LTPs), and so in the development of technologies based on LTPs. Recent progress in obtaining experimental benchmark data and the development of highly sophisticated computational methods is highlighted. With the cesium-based diode-pumped alkali laser and remote plasma etching of Si3N4 as examples, we demonstrate how accurate and comprehensive datasets for electron collisions enable complex modeling of plasma-using technologies that empower our high-technology-based society.
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