期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 25, 期 2, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0963-0252/25/2/025005
关键词
diamond; high pressure; glow discharge; microplasma
资金
- UK Engineering and Physical Sciences Research Council [EP/G069980/1, EP/K018388/1]
- EPSRC [EP/K018388/1, EP/G069980/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/K018388/1, EP/G069980/1] Funding Source: researchfish
We report the generation and characterization of dc helium microdischarges at several times atmospheric pressure in monolithic diamond hollow-cathode devices having cavity diameters on the order of 100 mu m. I-V characteristics indicated operation in the glow discharge regime even at nearly 10 atm, while spectroscopic measurements of the N-2 C-3 Pi(u) -> B-3 Pi(g) emission returned rotational temperatures always around 420 K, with a pressure-dependent vibrational population distribution. The variation of breakdown voltage with pressure closely followed Paschen's law, but with offsets in both axes that we tentatively ascribe to strong diffusive loss and a partial thermalization of electron energies under the high pressures considered here.
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