期刊
OPTICS EXPRESS
卷 24, 期 12, 页码 12893-12904出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.24.012893
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资金
- Slovak Research and Development Agency (SRDA) [APVV-0025-12]
- National Research Council Canada
- European Research Council (ERC) under the European Union (ERC POPSTAR) [647342]
- European Research Council (ERC) [647342] Funding Source: European Research Council (ERC)
We report, for the first time, on the design and experimental demonstration of fiber-chip surface grating couplers based on subwavelength grating engineered nanostructure operating in the low fiber chromatic dispersion window (around 1.3 mu m wavelengths), which is of great interest for short-reach data communication applications. Our coupler designs meet the minimum feature size requirements of large-volume deep-ultraviolet stepper lithography processes. The fiber-chip couplers are implemented in a standard 220-nm-thick silicon-on-insulator (SOI) platform and are fabricated by using a single etch process. Several types of couplers are presented, specifically the uniform, the apodized, and the focusing designs. The measured peak coupling efficiency is -2.5 dB (56%) near the central wavelength of 1.3 mu m. In addition, by utilizing the technique of the backside substrate metallization underneath the grating couplers, the coupling efficiency of up to -0.5 dB (89%) is predicted by Finite Difference Time Domain (FDTD) calculations. (C) 2016 Optical Society of America
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