期刊
OPTICS EXPRESS
卷 24, 期 14, 页码 15872-15881出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.24.015872
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资金
- Ministero dell'Istruzione, dell'Universita e della Ricerca [PON02 00675, PON02 00576]
- National Science Foundation (NSF) (ERC MIRTHE awards)
- USA Robert Welch Foundation [R4925S]
The implementation, performance validation, and testing of a gas-leak optical sensor based on mid-IR quartz-enhanced photoacoustic (QEPAS) spectroscopic technique is reported. A QEPAS sensor was integrated in a vacuum-sealed test station for mechatronic components. The laser source for the sensor is a quantum cascade laser emitting at 10.56 mu m, resonant with a strong absorption band of sulfur hexafluoride (SF6), which was selected as a leak tracer. The minimum detectable concentration of the QEPAS sensor is 2.7 parts per billion with an integration time of 1 s, corresponding to a sensitivity of leak flows in the 10(-9) mbar.l/s range, comparable with state-of-the-art leak detection techniques. (C) 2016 Optical Society of America
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