4.3 μm quantum cascade detector in pixel configuration

We present the design simulation and characterization of a quantum cascade detector operating at 4.3 mu m wavelength. Array integration and packaging processes were investigated. The device operates in the 4.3 mu m CO2 absorption region and consists of 64 pixels. The detector is designed fully compatible to standard processing and material growth methods for scalability to large pixel counts. The detector design is optimized for a high device resistance at elevated temperatures. A QCD simulation model was enhanced for resistance and responsivity optimization. The substrate illuminated pixels utilize a two dimensional Au diffraction grating to couple the light to the active region. A single pixel responsivity of 16 mA/W at room temperature with a specific detectivity D* of 5 center dot 10(7) cm root Hz/W was measured. (C) 2016 Optical Society of America