期刊
CHEMICAL VAPOR DEPOSITION
卷 21, 期 10-12, 页码 281-287出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/cvde.201507179
关键词
AACVD; Thin Film; Zinc carbodiimide; Zinc cyanamide
There has been a resurgence of interest in metal carbodiimides in recent years and in this paper we present a route to the synthesis of one of these phases, zinc carbodiimide, previously known as zinc cyanamide, in the form of a sub-micrometer thin film, using aerosol-assisted (AA) CVD from a solution of zinc acetate and urea in methanol, with the carbodiimide ion being formed from the decomposition of the urea molecule. Thin film synthesis is achieved over a deposition temperature range 375 - 500 degrees C, with a minimum ratio of urea to zinc acetate of 2: 1 and a maximum of 5: 1 established as viable for film formation. This work presents the first example of the synthesis of a ZnNCN thin film, or indeed any metal carbodiimide thin film, using a CVD technique.
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