期刊
ACS APPLIED ELECTRONIC MATERIALS
卷 5, 期 11, 页码 6189-6196出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsaelm.3c01105
关键词
amorphous oxide semiconductors; a-SiZnSnO; thin-film transistor; metal capping layer; sub-source
The metal-capping structure with four-terminal driving allows for tunability of the threshold voltage, improving the performance of thin-film transistors. This operating principle has potential applications in various systems, providing compensation for external stresses affecting display pixels.
We report on a metal-capping (MC) structure with threshold voltage (V-th) tunability via four-terminal driving. Amorphous oxide semiconductors (AOSs) are emerging as promising next-generation semiconductor materials due to their remarkable properties, such as high field-effect mobility, uniformity, and excellent transmittance in the visible light region. The MC structure is a simple structure that can improve the characteristics of a thin-film transistor (TFTs) based on AOSs. By applying additional voltage to this MC layer, we were able to control the amount and direction of carrier flow during the I-V operation. With the four-terminal drive, the V-th of the MC TFT can be modulated according to the voltage applied to the MC layer. When a negative voltage is applied to the MC layer, the V-th shifts to the negative region, and when a positive voltage is applied, the V-th shifts to the positive region. With the four-terminal MC TFT, we expect to be able to compensate for V-th modulated by external stresses that significantly affect the display pixels. Furthermore, it is expected that this operating principle can be utilized in many application systems, such as sensors.
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