期刊
NATURE PHYSICS
卷 12, 期 8, 页码 794-799出版社
NATURE PUBLISHING GROUP
DOI: 10.1038/NPHYS3708
关键词
-
资金
- US Department of Energy (DOE) Office of Science, Office of Basic Energy Sciences (BES) [DE-FG02-07ER46380]
- DOE BES grant [DE-FG02-03ER46037]
- DOE Office of Science [DE-AC02-06CH11357]
- U.S. Department of Energy (DOE) [DE-FG02-07ER46380] Funding Source: U.S. Department of Energy (DOE)
The properties of artificially grown thin films are often strongly affected by the dynamic relationships between surface growth processes and subsurface structure. Coherent mixing of X-ray signals promises to provide an approach to better understand such processes. Here, we demonstrate the continuously variable mixing of surface and bulk scattering signals during realtime studies of sputter deposition of a-Si and a-WSi2 films by controlling the X-ray penetration and escape depths in coherent grazing-incidence small-angle X-ray scattering. Under conditions where the X-ray signal comes from both the growth surface and the thin film bulk, oscillations in temporal correlations arise from coherent interference between scattering from stationary bulk features and from the advancing surface. We also observe evidence that elongated bulk features propagate upwards at the same velocity as the surface. Furthermore, a highly surface-sensitive mode is demonstrated that can access the surface dynamics independently of the subsurface structure.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据