☆ 4.6 Article

Density functional theory insights of phonons modes behaviours in AlScN for surface acoustic wave applications

MATERIALS TODAY COMMUNICATIONS (2023)

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Summary: In this paper, a SAW device based on piezoelectric films containing AlN, AlScN (Sc-20 at%) and AlScN (Sc-30 at%) was prepared and optimized using reactive magnetron sputtering. The intrinsic electromechanical coupling coefficient kt2 of AlScN (Sc-20 at%) and AlScN (Sc-30 at%) was calculated and found to be better than that of AlN. TEM observation confirmed the results. The SAW devices were tested, and the keff2 value of AlScN (Sc-20 at%) was higher than that of AlN and AlScN (Sc-30 at%), while the kt2 value of AlScN (Sc-30 at%) was higher than others. The study showed that crystallinity and orientation of the material have a greater impact on keff2, but not on kt2 during device preparation.

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