期刊
NATURE MATERIALS
卷 16, 期 2, 页码 244-251出版社
NATURE PUBLISHING GROUP
DOI: 10.1038/NMAT4798
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资金
- US Department of Energy, Office of Science, Basic Energy Sciences, Materials Science and Engineering Division
- French ANR [ANR-11-BS10-0005]
- French OPTITEC cluster
- US Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-AC02-06CH11357]
- Agence Nationale de la Recherche (ANR) [ANR-11-BS10-0005] Funding Source: Agence Nationale de la Recherche (ANR)
Coherent X-ray microscopy by phase retrieval of Bragg diffraction intensities enables lattice distortions within a crystal to be imaged at nanometre-scale spatial resolutions in three dimensions. While this capability can be used to resolve structure-property relationships at the nanoscale under working conditions, strict data measurement requirements can limit the application of current approaches. Here, we introduce an efficient method of imaging three-dimensional (3D) nanoscale lattice behaviour and strain fields in crystalline materials with a methodology that we call 3D Bragg projection ptychography (3DBPP). This method enables 3D image reconstruction of a crystal volume from a series of two-dimensional X-ray Bragg coherent intensity diffraction patterns measured at a single incident beam angle. Structural information about the sample is encoded along two reciprocal-space directions normal to the Bragg diffracted exit beam, and along the third dimension in real space by the scanning beam. We present our approach with an analytical derivation, a numerical demonstration, and an experimental reconstruction of lattice distortions in a component of a nanoelectronic prototype device.
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