☆ 4.7 Review

Thin-film PMUTs: a review of over 40 years of research

MICROSYSTEMS & NANOENGINEERING (2023)

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Article Chemistry, Multidisciplinary

Soft Robotic Perception System with Ultrasonic Auto-Positioning and Multimodal Sensory Intelligence

Qiongfeng Shi et al.

Summary: A soft robotic perception system with remote object positioning and multimodal cognitive capability is developed by integrating an ultrasonic sensor with flexible triboelectric sensors. The system allows for accurate object positioning and identification, expanding the adaptability of current soft robotic systems in various applications.

ACS NANO (2023)

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Article Physics, Applied

Microwave-induced thermoacoustic imaging with a multi-cell AlScN piezoelectric micromachined ultrasonic transducer

Yiwei Wang et al.

Summary: This study presents a microwave-induced thermoacoustic imaging method using a multi-cell aluminum scandium nitride (AlScN) piezoelectric micromachined ultrasonic transducer (PMUT). Thermoacoustic signals are generated by microwave pulses and detected by the ultrasonic transducer, allowing for noninvasive clinical diagnosis. Experimental results demonstrate that the AlScN PMUT device significantly improves the imaging of biological samples, reducing the mean square error by up to 72%, thanks to a 2.96 times larger detection angle compared to commercial ultrasonic transducers. These miniaturized and high-performance PMUT devices have the potential for clinical or personal diagnosis and monitoring equipment.

APPLIED PHYSICS LETTERS (2023)

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Proceedings Paper Engineering, Electrical & Electronic

MICROWAVE-INDUCED THERMOACOUSTIC IMAGING USING ALUMINUM NITRIDE PMUT

Yiwei Wang et al.

Summary: This paper presents the application of an aluminum nitride (AlN) multi-cell piezoelectric micromachined ultrasonic transducer (PMUT) device in microwave-induced thermoacoustic imaging (MITAI). For the first time, PMUT is used as the ultrasonic transducer (UT) in thermoacoustic imaging. The proposed PMUT device improves frequency response through the design of cells with cavities of different diameters. The utilization of PMUT device leads to significantly higher quality image reconstruction, with a decrease of 53% in mean square error (MSE) and an increase of 19.7 times in structural similarity (SSIM). This advancement has the potential to enable smaller and better medical MITAI equipment.

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS (2023)

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Article Engineering, Electrical & Electronic

Zero-Power Ultrasonic Wakeup Receiver Based on MEMS Switches for Implantable Medical Devices

Flavius Pop et al.

Summary: This article demonstrates a zero-power ultrasonic wakeup receiver for intra-body communication with IMDs, which can receive and decode ultrasonic signals at low power consumption, showing great potential for internal communication in the human body.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2022)

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Article Multidisciplinary Sciences

Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers for high data-rate intrabody communication

Flavius Pop et al.

Summary: This paper presents a high-data-rate intrabody communication link based on Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers. By activating multiple vibration modes, a high communication link can be achieved to monitor implanted medical devices, meeting the needs of medical monitoring.

NATURE COMMUNICATIONS (2022)

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Article Chemistry, Physical

Implementing (K,Na)NbO3-based lead-free ferroelectric films to piezoelectric micromachined ultrasonic transducers

Yu Huang et al.

Summary: Piezoelectric micromachined ultrasonic transducers (pMUTs) have attracted widespread attention due to their important applications in medical imaging, fingerprint identification, range-finding, and gesture recognition. However, the toxicity of lead limits the use of piezoelectric Pb(Zr, Ti)O-3 (PZT) in medical-related applications. This study successfully developed lead-free (K,Na)NbO3 (KNN) based pMUTs, which achieved an ultrahigh transmitting sensitivity.

NANO ENERGY (2022)

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Article Nanoscience & Nanotechnology

Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging

Junxiang Cai et al.

Summary: This paper describes the use of an aluminum nitride (AlN) piezoelectric micromachined ultrasound transducer (PMUT) array for high-resolution photoacoustic (PA) imaging. By utilizing the high-order resonance modes of the PMUT, the imaging resolution is improved. The PMUT, based on microelectromechanical systems (MEMS), is suitable for PA endoscopic imaging of blood vessels and bronchi due to its small size and high sensitivity. The study focuses on the characterization and analysis of the PMUT's high-order resonance modes, which provide higher frequencies and wider bandwidth for PA signal detection, leading to increased resolution compared to working at the fundamental resonance mode.

MICROSYSTEMS & NANOENGINEERING (2022)

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Article Nanoscience & Nanotechnology

Thin ceramic PZT dual- and multi-frequency pMUT arrays for photoacoustic imaging

Qincheng Zheng et al.

Summary: This article reports on the development of ceramic thin-film PZT-based dual- and multi-frequency piezoelectric micromachined ultrasonic transducer (pMUT) arrays and their demonstration in photoacoustic imaging (PAI) applications. The fabricated pMUT arrays exhibited high electromechanical coupling coefficients and large vibration displacements, allowing for successful detection and reconstruction of photoacoustic signals with different frequencies. The advantages of using dual- and multi-frequency pMUT arrays to provide comprehensive photoacoustic images with high spatial resolution and large signal-to-noise ratio simultaneously were demonstrated.

MICROSYSTEMS & NANOENGINEERING (2022)

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Article Multidisciplinary Sciences

Neuromorphic object localization using resistive memories and ultrasonic transducers

Filippo Moro et al.

Summary: This study presents a neuromorphic in-memory event-driven system for real-world object localization applications, which is orders of magnitude more energy efficient than microcontrollers.

NATURE COMMUNICATIONS (2022)

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Article Nanoscience & Nanotechnology

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

Eyglis Ledesma et al.

Summary: This research introduces a compact single cell for monitoring fluid properties, demonstrating high sensitivity and performance using a single device for multi-functional detection.

MICROSYSTEMS & NANOENGINEERING (2022)

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Article Nanoscience & Nanotechnology

MEMS ultrasonic transducers for safe, low-power and portable eye-blinking monitoring

Sheng Sun et al.

Summary: Eye blinking is closely related to human physiology and psychology, and serves as an effective method of communication and human-machine interaction. This paper proposes a portable ultrasound-based approach for monitoring eye-blinking activity, which offers advantages such as portability, low power consumption, high informational security, and biosafety.

MICROSYSTEMS & NANOENGINEERING (2022)

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Proceedings Paper Acoustics

High performance large-area polymeric PMUT phased arrays in air

Christopher Chare et al.

Summary: This study demonstrates the capability of large-area thin-film polymeric PMUTs for airborne ultrasound applications, and showcases the generated acoustic focal and trap fields in high resolution measurements.

2022 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS) (2022)

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Article Engineering, Electrical & Electronic

Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range Detection

Guo-Lun Luo et al.

Summary: This paper presents a low-frequency airborne piezoelectric micro-machined ultrasonic transducers (PMUTs) for long-range detection, utilizing single-crystal PZT material to achieve high piezoelectric coefficient and low dielectric constant for efficient and high sound pressure level output. Experimental results demonstrate high sensitivity and long-range detection capabilities.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2021)

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Article Engineering, Electrical & Electronic

Fully Flexible PMUT Based on Polymer Materials and Stress Compensation by Adaptive Frequency Driving

Yongbin Jeong et al.

Summary: A flexible PMUT device designed for curved surfaces shows variation in oscillation behavior and performance under different curvatures, with additional bending leading to improved device performance. An analytical model is introduced to predict driving frequency and optimum design based on bending curvature, resulting in a 37% increase in device oscillation performance when bent with a curvature of kappa = 20 m(-1).

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2021)

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Article Engineering, Electrical & Electronic

A PMUT Integrated Microfluidic System for Fluid Density Sensing

Kaustav Roy et al.

Summary: The study presents a fluid density sensor integrated with a microfluidic channel, demonstrating its potential for real-time monitoring and even detecting 1% changes in hemoglobin content, making it potentially useful for healthcare applications.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2021)

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Proceedings Paper Acoustics

Development of Frequency Tunable Fluid Loaded PMUTs

Kaustav Roy et al.

Summary: A novel technique has been developed for real-time frequency tuning in PMUTs, utilizing controlled virtual added mass in a microfluidic environment to switch the resonant frequency. This technique demonstrated a tuning range of 57% for a 500 μm circular PMUT, showing potential for wide frequency tuning in PMUTs.

INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS 2021) (2021)

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Proceedings Paper Acoustics

Piezoelectric over Silicon-on-Nothing (pSON) process

Jaibir Sharma et al.

Summary: This paper presents a novel fabrication process for piezoelectric micro-electromechanical systems using a membrane over a sealed cavity in bulk silicon, demonstrating excellent control over dimensions and alignment. It can be applied to various piezoelectric MEMS devices, with a 40 MHz piezoelectric resonator already demonstrated in this process.

INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS 2021) (2021)

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Proceedings Paper Acoustics

A Spiral Archimedean PMUT Array with Improved Focusing Performance

Jianyuan Wang et al.

Summary: Piezoelectric MEMS ultrasonic transducers have advantages of low power consumption and small size. The key performance is the acoustic emission performance. A new spiral Archimedean PMUT array is proposed in this paper, showing 18% higher acoustic emission pressure along the axis compared to traditional structures.

INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS 2021) (2021)

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Proceedings Paper Engineering, Electrical & Electronic

A PMUT INTEGRATED MICROFLUIDIC SYSTEM FOR VOLUMETRIC FLOW RATE SENSING

Kaustav Roy et al.

Summary: This study demonstrates the design and fabrication of a linear array of single-celled dual-electrode piezoelectric micromachined ultrasound transducers (PMUTs) integrated with a microfluidic channel. A novel technique of volumetric flow rate sensing based on resonant frequency shift is proposed, showcasing the potential of the PMUT-microfluidic integrated device as a volumetric flow rate sensor with a reported sensitivity of 537 ms/μl/hr.

2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) (2021)

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Proceedings Paper Engineering, Electrical & Electronic

A SINGLE CHIP DIRECTIONAL LOUDSPEAKER BASED ON PMUTS

Zhichun Shao et al.

Summary: This paper introduces a highly directional air-coupled parametric loudspeaker using a single chip of piezoelectric micromachined ultrasonic transducers, achieving advancements in micromachined parametric array, highly directional audible sound generation, and multiple audible frequencies on a single chip. The proposed AN pMUT parametric array could potentially be used for low-power portable directional loudspeakers for private communication.

2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) (2021)

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Article Acoustics

A Photoacoustic Imaging Device Using Piezoelectric Micromachined Ultrasound Transducers (PMUTs)

Ajay Dangi et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2020)

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Article Engineering, Electrical & Electronic

Fluid Density Sensing Using Piezoelectric Micromachined Ultrasound Transducers

Kaustav Roy et al.

IEEE SENSORS JOURNAL (2020)

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Article Chemistry, Analytical

Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film

Eunjung Shin et al.

MICROMACHINES (2020)

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Article Engineering, Electrical & Electronic

Bendable Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays Based on Silicon-On-Insulator (SOI) Technology

Sina Sadeghpour et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)

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Article Engineering, Electrical & Electronic

A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate

Ruochen Lu et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)

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Proceedings Paper Engineering, Electrical & Electronic

A Single Cell PMUT as a Bio-Fluid Density Sensor

Kaustav Roy et al.

PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) (2020)

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Review Chemistry, Analytical

Advances in Capacitive Micromachined Ultrasonic Transducers

Kevin Brenner et al.

MICROMACHINES (2019)

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Article Chemistry, Physical

Self-powered multifunctional monitoring system using hybrid integrated triboelectric nanogenerators and piezoelectric microsensors

Changhe Sun et al.

NANO ENERGY (2019)

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Proceedings Paper Engineering, Electrical & Electronic

TRANSMITTING SENSITIVITY ENHANCEMENT OF PMUTS VIA RELEASING RESIDUAL STRESS BY V-SHAPED SPRINGS

Xuying Chen et al.

2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) (2019)

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Proceedings Paper Engineering, Electrical & Electronic

CONCENTRIC PMUT ARRAYS FOR FOCUSED ULTRASOUND AND HIGH INTENSITY APPLICATIONS

Benjamin E. Eovino et al.

2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) (2019)

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Article Engineering, Electrical & Electronic

Effects of DC Bias Tuning on Air-Coupled PZT Piezoelectric Micromachined Ultrasonic Transducers

Yuri Kusano et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2018)

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Article Engineering, Electrical & Electronic

Piezoelectric micromachined ultrasonic transducers with low thermoelastic dissipation and high quality factor

Xuying Chen et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2018)

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Article Chemistry, Analytical

Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer

Pham Ngoc Thao et al.

MICROMACHINES (2018)

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Article Engineering, Electrical & Electronic

Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers

Qi Wang et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2017)

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Article Chemistry, Analytical

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Junhong Li et al.

SENSORS (2017)

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Article Engineering, Electrical & Electronic

System level modeling and design maps of PMUTs with residual stresses

Ajay Dangi et al.

SENSORS AND ACTUATORS A-PHYSICAL (2017)

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Article Engineering, Electrical & Electronic

Epitaxial PMnN-PZT/Si MEMS ultrasonic rangefinder with 2 m range at 1 V drive

Zhen Zhou et al.

SENSORS AND ACTUATORS A-PHYSICAL (2017)

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Review Engineering, Electrical & Electronic

Review of piezoelectric micromachined ultrasonic transducers and their applications

Joontaek Jung et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2017)

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Article Engineering, Biomedical

All-in-one low-intensity pulsed ultrasound stimulation system using piezoelectric micromachined ultrasonic transducer (pMUT) arrays for targeted cell stimulation

Wonjun Lee et al.

BIOMEDICAL MICRODEVICES (2017)

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Article Physics, Applied

Investigation of geometric design in piezoelectric microelectromechanical systems diaphragms for ultrasonic energy harvesting

Qiongfeng Shi et al.

APPLIED PHYSICS LETTERS (2016)

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Article Engineering, Electrical & Electronic

3-D Ultrasonic Fingerprint Sensor-on-a-Chip

Hao-Yen Tang et al.

IEEE JOURNAL OF SOLID-STATE CIRCUITS (2016)

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Article Engineering, Electrical & Electronic

Bimorph Piezoelectric Micromachined Ultrasonic Transducers

Sina Akhbari et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2016)

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Article Engineering, Electrical & Electronic

Enhancement of the Transmission of Piezoelectric Micromachined Ultrasonic Transducer With an Isolation Trench

Mingjun Wang et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2016)

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Article Nanoscience & Nanotechnology

Highly sensitive piezoelectric micromachined ultrasonic transducer operated in air

Tao Wang et al.

MICRO & NANO LETTERS (2016)

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Article Multidisciplinary Sciences

Ultrastructural Characterization of the Lower Motor System in a Mouse Model of Krabbe Disease

Valentina Cappello et al.

SCIENTIFIC REPORTS (2016)

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Article Chemistry, Multidisciplinary

Nanopatterned Textile-Based Wearable Triboelectric Nanogenerator

Wanchul Seung et al.

ACS NANO (2015)

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Article Chemistry, Multidisciplinary

Micropatterned P(VDF-TrFE) Film-Based Piezoelectric Nanogenerators for Highly Sensitive Self-Powered Pressure Sensors

Ju-Hyuck Lee et al.

ADVANCED FUNCTIONAL MATERIALS (2015)

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Article Physics, Applied

Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

Y. Lu et al.

APPLIED PHYSICS LETTERS (2015)

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Article Physics, Applied

Micromachined piezoelectric ultrasonic transducer with ultra-wide frequency bandwidth

Tao Wang et al.

APPLIED PHYSICS LETTERS (2015)

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Article Engineering, Electrical & Electronic

A Piezoelectric Micromachined Ultrasonic Transducer Using Piston-Like Membrane Motion

Tao Wang et al.

IEEE ELECTRON DEVICE LETTERS (2015)

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Article Engineering, Electrical & Electronic

3D Ultrasonic Rangefinder on a Chip

Richard J. Przybyla et al.

IEEE JOURNAL OF SOLID-STATE CIRCUITS (2015)

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Article Engineering, Electrical & Electronic

Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers

Yipeng Lu et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2015)

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Article Engineering, Electrical & Electronic

Zero-Bending Piezoelectric Micromachined Ultrasonic Transducer (pMUT) With Enhanced Transmitting Performance

Tao Wang et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2015)

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Review Chemistry, Analytical

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Yongqiang Qiu et al.

SENSORS (2015)

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Article Multidisciplinary Sciences

Standards and figure-of-merits for quantifying the performance of triboelectric nanogenerators

Yunlong Zi et al.

NATURE COMMUNICATIONS (2015)

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Article Acoustics

In Vivo Real-Time 3-D Intracardiac Echo Using PMUT Arrays

David E. Dausch et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2014)

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Article Physics, Applied

AlN-based piezoelectric micromachined ultrasonic transducer for photoacoustic imaging

Bingzhang Chen et al.

APPLIED PHYSICS LETTERS (2013)

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Article Chemistry, Analytical

An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging

Yi Yang et al.

SENSORS (2013)

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Article Acoustics

Theoretical Modeling and Equivalent Electric Circuit of a Bimorph Piezoelectric Micromachined Ultrasonic Transducer

Firas Sammoura et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2012)

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Article Engineering, Electrical & Electronic

In-Air Rangefinding With an AlN Piezoelectric Micromachined Ultrasound Transducer

Richard J. Przybyla et al.

IEEE SENSORS JOURNAL (2011)

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Article Chemistry, Multidisciplinary

Mechanically Powered Transparent Flexible Charge-Generating Nanodevices with Piezoelectric ZnO Nanorods

Min-Yeol Choi et al.

ADVANCED MATERIALS (2009)

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Article Materials Science, Multidisciplinary

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

P. Muralt et al.

MRS BULLETIN (2009)

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Article Acoustics

Theory and Operation of 2-D Array Piezoelectric Micromachined Ultrasound Transducers

David E. Dausch et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2008)

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Article Engineering, Electrical & Electronic

Development of piezoelectric micromachined ultrasonic transducers

F Akasheh et al.

SENSORS AND ACTUATORS A-PHYSICAL (2004)

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Article Engineering, Electrical & Electronic

Ultrasonic micro array sensors using piezoelectric thin films and resonant frequency tuning

K Yamashita et al.

SENSORS AND ACTUATORS A-PHYSICAL (2004)

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Article Engineering, Electrical & Electronic

{100}-textured, piezoelectric Pb(Zrx Ti1-x)O3 thin films for MEMS:: integration, deposition and properties

N Ledermann et al.

SENSORS AND ACTUATORS A-PHYSICAL (2003)

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Article Acoustics

Piezoelectrically actuated flextensional micromachined ultrasound transducers -: I:: Theory

G Perçin et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2002)

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Article Acoustics

Piezoelectrically actuated flextensional micromachined ultrasound transducers -: II:: Fabrication and experiments

G Perçin et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2002)

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