期刊
MICROSYSTEMS & NANOENGINEERING
卷 9, 期 1, 页码 -出版社
SPRINGERNATURE
DOI: 10.1038/s41378-023-00575-3
关键词
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In this paper, we report the development of heated fluidic resonators for simultaneous and quantitative thermophysical measurements of ultrasmall liquid volumes. By reducing thermal loss, we were able to significantly improve the precision of these resonators in a vacuum. The increased measurement sensitivities for thermal conductivity and specific heat capacity make the differentiation between liquids with similar properties more accurate.
For simultaneous and quantitative thermophysical measurements of ultrasmall liquid volumes, we have recently developed and reported heated fluidic resonators (HFRs). In this paper, we improve the precision of HFRs in a vacuum by significantly reducing the thermal loss around the sensing element. A vacuum chamber with optical, electrical, and microfluidic access is custom-built to decrease the convection loss by two orders of magnitude under 10(-4) mbar conditions. As a result, the measurement sensitivities for thermal conductivity and specific heat capacity are increased by 4.1 and 1.6 times, respectively. When differentiating between deionized water (H2O) and heavy water (D2O) with similar thermophysical properties and similar to 10% different mass densities, the signal-to-noise ratio (property differences over standard error) for H2O and D2O is increased by 9 and 5 times for thermal conductivity and specific heat capacity, respectively.
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