Synthesis of LiPON Solid Electrolyte Films by Thermal Evaporation of Lithium Orthophosphate

Lithium phosphorus-oxynitride (LiPON) films were deposited by the method of anodic evaporation of Li3PO4 in the nitrogen plasma of a low-pressure arc. A method for adjusting the degree of decomposition of vapors is proposed based on a change in the frequency of interaction of electrons with vapors at a constant heating power of the anode-crucible. The conditions ensuring the formation of films with a homogeneous microstructure and ionic conductivity (1-2) x 10-6 S/cm at a deposition rate of 8 nm/min have been determined. It is shown that the degree of vapor dissociation critically affects the morphology of the films and the magnitude of their ionic conductivity. The results of cyclic tests of LiPON films deposited by anodic evaporation in a low-pressure arc are presented.

Automated summary

In this study, lithium phosphorus-oxynitride (LiPON) films with homogeneous microstructure and high ionic conductivity were successfully deposited by anodic evaporation in a low-pressure arc. It was found that the degree of vapor dissociation critically affects the morphology of the films and their ionic conductivity.