期刊
JOURNAL OF MANUFACTURING PROCESSES
卷 99, 期 -, 页码 310-320出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.jmapro.2023.04.056
关键词
Ultra-precision diamond turning; Additional rotational motions; Partially overlapping Fresnel lens array
To address the low efficiency and cutting tool interference issues in machining high aspect ratio surfaces or complex microstructures with existing diamond turning techniques, a novel method is proposed by introducing two additional rotational motions into the traditional ultra-precision machine tool. This allows for arbitrary adjustment of the tool posture during the machining process and enables efficient machining of intricate microstructures, such as monolithic microstructural optics, using the side cutting edge. The mechanical system, machining principle, tool path planning, compensation for tool tip offset, fabrication and inspection of a partially overlapping Fresnel lens array, as well as the analysis of measurement data, are presented to validate the successful fabrication of such complex microstructures with high profile accuracy and surface quality.
Optical surfaces and microstructures with high form accuracy and excellent surface quality are widely utilized nowadays and the diamond machining technology is still preferable for the fabrication of these workpieces. However, when machining surfaces featuring a high aspect ratio or intricate microstructures like monolithic microstructural optics, the machining efficiency is quite low and the cutting tool interference is inevitable for the existing diamond turning techniques. Hence, a novel method is proposed to machine such microstructures by introducing two additional rotational motions into the traditional ultra-precision machine tool. In this way, the arbitrary adjustment of the tool posture may be achieved in the machining process and intricate microstructures like monolithic microstructural optics can also be machined by the side cutting edge with high efficiency. The whole mechanical system and machining principle are presented firstly. Next, the tool path planning and the compensation for the tool tip offset are introduced. Then, the partially overlapping Fresnel lens array consisting of two segmented Fresnel lenses are fabricated and inspected. Finally, the measurement data are analyzed and the proposed method is validated to be able to fabricate such complex microstructures with high profile accuracy and surface quality successfully.
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