Inductively-coupled-plasma-induced electret enhancement for triboelectric nanogenerators

Polyethylene terephthalate (PET) films' electret property was significantly enhanced after being treated with inductively coupled plasma (ICP). Based on this modified material, the triboelectric nanogenerators' (TENGs) transferred charges remained at 68.6% of the initial value after 400 000 cycles of contact-separation process, which was about three times that of the untreated samples.