期刊
NANO RESEARCH
卷 9, 期 8, 页码 2510-2519出版社
TSINGHUA UNIV PRESS
DOI: 10.1007/s12274-016-1137-3
关键词
photolithography; supercapacitors; pyrolysis; microelectromechanical system (MEMS); carbon nanotubes
类别
资金
- National Basic Research Program of China [2013CB934103]
- National Natural Science Fund for Distinguished Young Scholars [51425204]
- National Natural Science Foundation of China [51521001, 51502227]
- China Postdoctoral Science Foundation [2015T80845]
- Fundamental Research Funds for the Central Universities (WUT) [2014-IV-062, 2014-IV-147, 2014-YB-002, 2016III005]
In the last decade, pyrolyzed-carbon-based composites have attracted much attention for their applications in micro-supercapacitors. Although various methods have been investigated to improve the performance of pyrolyzed carbons, such as conductivity, energy storage density and cycling performance, effective methods for the integration and mass-production of pyrolyzed-carbon-based composites on a large scale are lacking. Here, we report the development of an optimized photolithographic technique for the fine micropatterning of photoresist/chitosan-coated carbon nanotube (CHIT-CNT) composite. After subsequent pyrolysis, the fabricated carbon/CHIT-CNT microelectrode-based micro-supercapacitor has a high capacitance (6.09 mF center dot cm(-2)) and energy density (4.5 mWh center dot cm(-3)) at a scan rate of 10 mV center dot s(-1). Additionally, the micro-supercapacitor has a remarkable long-term cyclability, with 99.9% capacitance retention after 10,000 cyclic voltammetry cycles. This design and microfabrication process allow the application of carbon microelectromechanical system (C-MEMS)-based micro-supercapacitors due to their high potential for enhancing the mechanical and electrochemical performance of micro-supercapacitors.
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